Electron Microscopy Facility

JSM-5600 SEM


Dualbeam

Sample Preparation

Jeol JSM-5600 Scanning Electron Microscope

JSM-5600
Specifications:

Resolution: 5 nm
Probe Current: 10-12-10-6 A
Accelerating Voltage: 0.5-30 kV
Specimen Size: 125 mm
Detectors: SE, EDX


The JSM-5600 is a conventional SEM with a tungsten filament electron source. It is equipped with a secondary electron detector for topographic contrast imaging and an Oxford Inca EDX system for compositional analysis.